Simulation and Experiment Study on Six-degrees-of-freedom Active Micro-vibration Isolation Platform

A six-degrees-of-freedom active micro-vibration isolation control system has been proposed and studied. The system consists of passive air springs and symmetrically placed electro-magnetic actuators. A mathematical model of the microvibration isolation platform is established, and  H control algorithm is designed for isolating vibration system. Simulation and experiment is carried out to verify the effectiveness of active micro-vibration control system. The results demonstrate that the proposed micro-vibration control system has good isolation performance. Keywords-active vibration control ; micro-vibration platform; electro-magnetic actuator