MEMS-based Micro-silicon Piezoresistive Accelerometer Design

Silicon Micro Devices MEMS accelerometer is an important branch, with a wide range of applications. As the silicon micro-accelerometer has a fast response, high sensitivity, high precision, easy-to-small size, etc., and the kind of strong radiation sensors able to work under, it developed rapidly in recent years. The article first sensor structure and working principle was simple, given based on MEMS technology produced by the piezoresistive silicon micro-accelerometer on the structure and process, and produced by the acceleration sensor dynamic test samples, test results show that And basically consistent with the theory of the design value.