Virtual control - a virtual cluster tool for testing and verifying a cluster tool controller and a scheduler

In this paper, a systematic practice for verifying a scheduler and a CTC using a virtual cluster tool (VCT) model are presented, which emulates the operational behavior of a real cluster tool with high fidelity. The model architecture and modeling strategies of the VCT were also explained. This paper also presented the use of a formal model-based automatic error-detection technique and discussed experiences of verifying a real cluster tool controller using the VCT.