论文信息 - Nanoporous Metal–Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics - 字舞流文

Nanoporous Metal–Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

R. Ameloot | M. Karppinen | Jenna Multia | A. Philip | Víctor Rubio‐Giménez | D. Kravchenko