论文信息 - Effects of low-temperature Si buffer thickness and SiGe oxidation on sensitivity of Si1−xGex nanowire - 字舞流文

Effects of low-temperature Si buffer thickness and SiGe oxidation on sensitivity of Si1−xGex nanowire

Kow-Ming Chang | A. Whang | Yi-Ming Chen | Huai-Yi Chen | H. Lai | Y. Lai | Shiu-Yu Wang | C. Lai | Tai-Yuan Chang | Chu-Feng Chen