论文信息 - Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition - 字舞流文

Epitaxial GaN using Ga(NMe2)3 and NH3 Plasma by Atomic Layer Deposition

B. Bakhit | J. Palisaitis | Erik Martinsson | Chih-Wei Hsu | S. Buttera | N. O’Brien | H. Pedersen | P. Rouf | Ivana Martinović