High-Performance Junction Barrier Schottky Rectifier With Optimized Structure

Junction barrier Schottky (JBS) rectifiers with p-well on 4H-SiC for improving the electrical performance are proposed. Compared with the common JBS rectifier, the devices show an increasing breakdown voltage due to a uniform electric field. Forward and reverse characteristics have been verified at room and elevated temperatures. As a result, the breakdown voltage of 1.9 kV was obtained for the JBS rectifier with the P+ grids on the p-well (POP), and that of the JBS rectifier with the P+ grids in the p-well (PIP) is about 1.6 kV. The forward voltage drops of the POP and PIP JBS rectifiers at a current density of 100 A/cm2 are 3 and 3.2 V, respectively. The POP and PIP JBS rectifiers have more than 3.3 ×1010 and 5.4 ×1010 on/off (1 V/ -500 V) current ratios, respectively. In addition, the output capacitance of the POP JBS rectifier at -3 V reduces about 15% relative to that of the common JBS rectifier. In addition, the figures of merit of the POP and PIP JBS rectifiers are about 4.1 times and 2.9 times that of the common JBS rectifier, respectively.

[1]  Lin Zhu,et al.  Advanced High-Voltage 4H-SiC Schottky Rectifiers , 2008, IEEE Transactions on Electron Devices.

[2]  Atul Mahajan,et al.  Design and optimization of junction termination extension (JTE) for 4H–SiC high voltage Schottky diodes , 2005 .

[3]  Jian H. Zhao,et al.  High performance 1500 V 4H-SiC junction barrier Schottky diodes , 2002 .

[4]  Lin Zhu,et al.  Analytical Modeling of High-Voltage 4H-SiC Junction Barrier Schottky (JBS) Rectifiers , 2008, IEEE Transactions on Electron Devices.

[5]  A. Jakubowski,et al.  Comparison of 4H-SiC and 6H-SiC MOSFET I-V characteristics simulated with Silvaco Atlas and Crosslight Apsys , 2007 .

[6]  J. Bluet,et al.  Barrier height homogeneity for 4.5 kV 4H-SiC Schottky diodes , 2006 .

[7]  H. Matsunami,et al.  Low-loss, high-voltage 6H-SiC epitaxial p-i-n diode , 2002 .

[8]  Ranbir Singh,et al.  Reliability and performance limitations in SiC power devices , 2006, Microelectron. Reliab..

[9]  J. Lai,et al.  High-power 4H-SiC JBS rectifiers , 2002 .

[10]  R. Raghunathan,et al.  High voltage 4H-SiC Schottky barrier diodes , 1995, IEEE Electron Device Letters.

[11]  J. Millan,et al.  Schottky versus bipolar 3.3 kV SiC diodes , 2008 .

[12]  K.A. Jones,et al.  Design, fabrication, and characterization of low forward drop, low leakage, 1-kV 4H-SiC JBS rectifiers , 2006, IEEE Transactions on Electron Devices.

[13]  S. Tian Monte Carlo Simulation of Ion Implantation in Crystalline SiC With Arbitrary Polytypes , 2008, IEEE Transactions on Electron Devices.

[14]  José Millán,et al.  Wide Band Gap power semiconductor devices , 2007, 2013 Spanish Conference on Electron Devices.