论文信息 - Non-contact internal-MMIC measurement using scanning force probing

Non-contact internal-MMIC measurement using scanning force probing

A non-contacting probe capable of internal vector measurements of MMICs is presented. Accurate internal amplitude and phase measurements can be made with micrometer spatial resolution, <1 fF loading and without the need to depassivate the circuit. A 10 GHz bandwidth probe is presented.

Greg E. Bridges | C. J. Falkingham | I.R.H Edwards

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