论文信息 - Effect of Trimethyl-aluminum Preflow on The Structure and Strain Properties of AlN Films - 字舞流文

Effect of Trimethyl-aluminum Preflow on The Structure and Strain Properties of AlN Films

H. Jiang | H. Jia | Chen Y.-R. | Sun X.-J. | Li Db | H. Song | Miao G.-Q. | Li Z.-M.