论文信息 - Structured SiN membranes as platform for cryogenic bolometers

Structured SiN membranes as platform for cryogenic bolometers

Cryogenic bolometers detect radiation by measuring the temperature increase in an appropriate absorber. To achieve sufficient detector sensitivity, we place the bolometer on a SiN membrane. Thermal coupling is further decreased by patterning the membrane in the shape of a platform suspended by several beams. We will describe the fabrication process and discuss the use of bolometer arrays for security cameras and telescopes.

[1] H. D. Castillo,et al. Composite infrared bolometers with Si3N4 micromesh absorbers. , 1997, Applied optics.

[2] Kent D. Irwin,et al. SQUID multiplexers for transition-edge sensors , 2002 .

[3] P. L. Richards,et al. Measurements of thermal transport in low stress silicon nitride films , 1998 .

[4] W. B. Doriese,et al. Electrical and optical measurements on the first SCUBA-2 prototype 1280 pixel submillimeter superconducting bolometer array. , 2007, The Review of scientific instruments.

[5] Ling Hao,et al. The microwave surface impedance of MgB2 thin films. , 2003 .

[6] Regis P. Brekosky,et al. Design and fabrication of superconducting transition edge X-ray calorimeters , 2000 .

[7] K. Irwin. An application of electrothermal feedback for high resolution cryogenic particle detection , 1995 .

[8] J. Peterson,et al. Antenna-coupled bolometer with a micromachined-beam thermal link , 1997 .

[9] Jonas Zmuidzinas,et al. Superconducting detectors and mixers for millimeter and submillimeter astrophysics , 2004, Proceedings of the IEEE.

[10] Adrian T. Lee,et al. A Fully Lithographed Voltage - biased Superconducting Spiderweb Bolometer , 1999 .

[11] H. Meyer,et al. Superconducting bolometer array with SQUID readout for submillimetre wavelength detection , 2003 .

[12] J. Bock,et al. Silicon nitride Micromesh Bolometer Array for Submillimeter Astrophysics. , 2001, Applied optics.