Development of an amorphous diamond (a-D) RF MEMS switch
暂无分享,去创建一个
John P. Sullivan | Gary D. Schmidt | Christopher D. Nordquist | Christopher W. Dyck | G. M. Kraus | Andrew James Carton | James R. Webster | Thomas A. Friedmann
[1] H. Grubin. The physics of semiconductor devices , 1979, IEEE Journal of Quantum Electronics.
[2] T. Alam,et al. Low temperature annealing in tetrahedral amorphous carbon thin films observed by13C NMR spectroscopy , 2003 .
[3] S. Eshelman,et al. Performance of low-loss RF MEMS capacitive switches , 1998 .
[4] D. Tallant,et al. Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond , 1997 .
[5] J. R. Reid,et al. Measurements of charging in capacitive microelectromechanical switches , 2002 .
[6] Jean-Philippe Polizzi,et al. Lifetime characterization of capacitive RF MEMS switches , 2005, SPIE MOEMS-MEMS.
[7] Klas Hjort,et al. Diamond and Amorphous Carbon MEMS , 2001 .
[8] H. L. Riley,et al. Amorphous carbon. , 1946, Journal of the Chemical Society.
[9] P. Schmid,et al. Surface micromachined diamond microswitch , 2000 .