Nanostructured cadmium oxide thin films for hydrogen sensor

Abstract Cadmium oxide (CdO) thin films have been deposited by reactive dc magnetron sputtering on to glass substrates at room temperature and subsequently annealed at 275 °C for 3 h in vacuum. The as-deposited and annealed films were characterized for their structural and optical properties. The films were also tested for hydrogen sensing at different operating temperatures. The annealed samples showed better response down to 50 ppm at a relatively low operating temperature of 100 °C. The role of non-equilibrium surface states as a possible sensing mechanism is explained.

[1]  G. E. Shahnazaryan,et al.  Hydrogen sensitive gas sensor based on porous silicon/TiO2−x structure , 2007 .

[2]  D. Dhawale,et al.  Sprayed CdO thin films for liquefied petroleum gas (LPG) detection , 2009 .

[3]  P. T. Moseley,et al.  Dopant effects on the response of gas-sensitive resistors utilising semiconducting oxides , 1991 .

[4]  S. Licoccia,et al.  CdO-based nanostructures as novel CO2 gas sensors , 2011, Nanotechnology.

[5]  Yun-Hyuk Choi,et al.  H2 sensing properties in highly oriented SnO2 thin films , 2007 .

[6]  Guowei Yang,et al.  Fabrication of a SnO2 Nanowire Gas Sensor and Sensor Performance for Hydrogen , 2008 .

[7]  Carles Cané,et al.  Fabrication of WO3 nanodot-based microsensors highly sensitive to hydrogen , 2010 .

[8]  A. K. Tyagi,et al.  Microstructure dependent ammonia sensing properties of nanostuctured zinc oxide thin films using in-house designed gas exposure facility , 2011, International Conference on Nanoscience, Engineering and Technology (ICONSET 2011).

[9]  A. Braun,et al.  The effect of annealing temperature on the structural, optical, and electrical properties of CdS films , 2010 .

[10]  L. Boon-Brett,et al.  Identifying performance gaps in hydrogen safety sensor technology for automotive and stationary applications , 2010 .

[11]  G. M. Rao,et al.  Characterization and gas sensitivity of cadmium oxide thin films prepared by thermal evaporation technique , 2012 .

[12]  F. Solzbacher,et al.  TiOx-modified NiO thin films for H2 gas sensors: effects of TiOx-overlayer sputtering parameters , 2000 .

[13]  Damon Honnery,et al.  Hydrogen's role in an uncertain energy future , 2009 .

[14]  Partha Mitra,et al.  ZnO thin film sensor , 1998 .

[15]  Dong Xiang,et al.  Metal Oxide Gas Sensors: Sensitivity and Influencing Factors , 2010, Sensors.