LIGA and related technologies for industrial application

Abstract The advance of microsystem technology is seen to consist of two phases: first, the development of microstructure technologies including a variety of microcomponents, and secondly, the integration of components to microsystems. For industrial implementation it is of vital importance to develop flexible fabrication schemes for microcomponents as well as manufacturing methods for hybrid microsystems, i.e., the combination of different technologies to one system. The LIGA technique is well suited for mass fabrication and for hybridization as well. Examples of a small-scale fabrication of ‘pure’ LIGA components and hybrid components are given.