Micromachining of a three-dimensional submillimeter structure using an ultraviolet high-power laser and a five-axis stage

We have been developed a micromachining system which is composed of a pulsed ultraviolet laser and a five axis mechanical stage. Micro windmill which was composed of a windmill and a bearing and has been successfully fabricated as an example of the most simple mechanical element. The material was polyimide and the typical length was about 1 mm. Taking the advantages of the size effect, we have successfully obtained the maximum number of rotation of about 90,000 rpm by blowing Nitrogen gas from a small nozzle.