论文信息 - Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories - 字舞流文

Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories

M. Rosmeulen | S. Ramesh | L. Ragnarsson | B. Kaczer | A. Belmonte | L. Nyns | G. Van den bosch | L. Breuil | A. Ajaykumar | G. K. El Hajjam | J. Soulie