论文信息 - Experimental verification of buried-oxide with over-8 MV/cm breakdown fields in low-dose SIMOX wafers - 字舞流文

Experimental verification of buried-oxide with over-8 MV/cm breakdown fields in low-dose SIMOX wafers

T. Yano | K. Kawamura | I. Hamaguchi | S. Takayama | Y. Nagatake | M. Tachimori | A. Matsumura | K. Kurumada