Seismic Power Generator Using High-Performance Polymer Electret

Development of a micro electret generator prototype for energy harvesting applications is presented. MEMS-friendly perfluoropolymer, CYTOP is adopted as high-performance electret material. When corona charging is employed, charge density as large as 1.37 mC/m2is obtained for a 15 mm-thick CYTOP film, which is much larger than that of Teflon AF. In power generation experiments using a prototype seismic generator, maximum output power of 38 mW is obtained with 2 mmp-poscillation at 20 Hz.

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