Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

When a pair of short- and long-lived excited molecules are coupled with an upper radiative state, it will be possible to derive the number density of the long-lived species from the optical emission spectroscopy of upper-level short-lived species by careful selection of the pair. Two-dimensional density distributions of the long-lived metastable state Ar(1s5) and that of the short-lived excited state Ar(2p2) are observed and compared in the time-averaged form, using a computerized tomography technique of the emissions from a pair of optical transitions in a two-frequency capacitively coupled plasma in pure Ar.

[1]  A. Yanguas-Gil,et al.  A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas , 2008 .

[2]  T. Makabe,et al.  Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar , 2008 .

[3]  T. Makabe,et al.  Plasma Electronics: Applications in Microelectronic Device Fabrication , 2006 .

[4]  T. Makabe,et al.  Functional separation in two frequency operation of an inductively coupled plasma , 2004 .

[5]  T. Makabe,et al.  Development of optical computerized tomography in capacitively coupled plasmas and inductively coupled plasmas for plasma etching , 2002 .

[6]  T. Yagisawa,et al.  Functional design of a pulsed two-frequency capacitively coupled plasma in CF4/Ar for SiO2 etching , 2002 .

[7]  M. Tadokoro,et al.  Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar , 1998 .

[8]  M. Tadokoro,et al.  Three Dimensional Optical Emission Tomography of an Inductively Coupled Plasma , 1997 .

[9]  T. Makabe,et al.  The time-resolved two-dimensional profile of a radiofrequency capacitively coupled plasma , 1997 .

[10]  Gregory A. Hebner,et al.  Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas , 1996 .

[11]  T. Makabe,et al.  Computer‐assisted optical emission tomography in a radiofrequency capacitively coupled plasma , 1996 .

[12]  Richard A. Gottscho,et al.  Ion transport in an electron cyclotron resonance plasma , 1991 .

[13]  T. Makabe,et al.  Diagnostics of high-frequency discharges in CH4/H2 by time- and space-resolved optical emission spectroscopy , 1990 .

[14]  I. Hutchinson.  Principles of Plasma Diagnostics , 1987 .

[15]  R. Chang,et al.  Radiative lifetimes and two‐body deactivation rate constants for Ar(3p5, 4p) and Ar(3p5,4p′) states , 1978 .