Large-scale-integrated silicon photonics using microdisk and microring resonators

We review our recent work on silicon photonic devices for on-chip optical interconnects and optofluidics. On the optical interconnects front, we demonstrate coupled-resonator optical waveguides with gapless inter-cavity coupling for on-chip wide-bandwidth high-order optical channel filters and optical delay lines. We propose a 5×5 matrix switch comprising two-dimensionally cascaded microring resonator-based electrooptic switches for network-on-chip applications and demonstrate a 2×2 matrix switch as a proof-of-concept. We demonstrate cavity-enhanced photocurrent generation in a p-i-n diode embedded microring resonator for wavelength-selective photodetection and monitoring on-chip optical networks. We also investigate a serial-cascaded double-microring-based silicon photonic circuit for high-speed on-chip clock-recovery applications. On the optofluidics front, we study silicon nitride based waveguides with integrated microfluidic channels for optical manipulation of microparticles.

[1]  Linjie Zhou,et al.  Microring and microdisk resonator integrated circuits on a silicon chip , 2007, SPIE OPTO.

[2]  Michal Lipson,et al.  Optical 4x4 hitless Silicon router for optical Networks-on-Chip (NoC): erratum , 2008 .

[3]  Hui Chen,et al.  On-Chip NRZ-to-PRZ Format Conversion Using Narrow-Band Silicon Microring Resonator-Based Notch Filters , 2008, Journal of Lightwave Technology.

[4]  Fang Xu,et al.  Multimode-interference waveguide crossing coupled microring-resonator-based switch nodes for photonic networks-on-chip , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[5]  Richard K. Chang,et al.  Microspiral Resonators for Integrated Photonics , 2008 .

[6]  Hui Chen,et al.  A serial-cascaded double-microring-based silicon photonic circuit for high-speed on-chip clock-recovery applications , 2009, 2009 6th IEEE International Conference on Group IV Photonics.

[7]  D. Psaltis,et al.  Nanofluidic tuning of photonic crystal circuits , 2006 .

[8]  M. Morse,et al.  31 GHz Ge n-i-p waveguide photodetectors on Silicon-on-Insulator substrate. , 2007, Optics express.

[9]  Xianshu Luo,et al.  Reciprocal transmissions and asymmetric modal distributions in waveguide-coupled spiral-shaped microdisk resonators. , 2007, Optics express.

[10]  Ian H. White,et al.  A simple device to allow enhanced bandwidths at 850 nm in multimode fibre links for gigabit LANs , 1999 .

[11]  Xianshu Luo,et al.  Many-element coupled-resonator optical waveguides using gapless-coupled microdisk resonators. , 2009, Optics express.

[12]  Shun-Hui Yang,et al.  Localization in silicon nanophotonic slow-light waveguides , 2008 .

[13]  Fang Xu,et al.  Cascaded active silicon microresonator array cross-connect circuits for WDM networks-on-chip , 2008, SPIE OPTO.

[14]  F. Xia,et al.  Ultracompact optical buffers on a silicon chip , 2007 .

[15]  Xianshu Luo,et al.  Coupled spiral-shaped microdisk resonators with non-evanescent asymmetric inter-cavity coupling. , 2007, Optics express.

[16]  R. Baets,et al.  Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. , 2007, Optics express.

[17]  G. Whitesides,et al.  Soft Lithography. , 1998, Angewandte Chemie.

[18]  L. Sekaric,et al.  Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator. , 2007, Optics express.

[19]  Ajay Joshi,et al.  BUILDING MANY-CORE PROCESSOR-TO-DRAM NETWORKS , 2009 .

[20]  Xianshu Luo,et al.  Cavity-enhanced photocurrent generation by 1.55 μm wavelengths linear absorption in a p-i-n diode embedded silicon microring resonator , 2009 .

[21]  Siva Yegnanarayanan,et al.  Design and Demonstration of Compact, Wide Bandwidth Coupled-resonator Filters on a Silicon- On-insulator Platform References and Links , 2022 .

[22]  Ying-Hao Kuo,et al.  A hybrid AlGaInAs-silicon evanescent preamplifier and photodetector. , 2007, Optics express.

[23]  Xianshu Luo,et al.  Double-notch-shaped microdisk resonator devices with gapless coupling on a silicon chip , 2009 .

[24]  Xianshu Luo,et al.  101-element cascaded-microdisk resonators on a silicon chip , 2009, 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference.

[25]  John E. Bowers,et al.  Integrated AlGaInAs-silicon evanescent race track laser and photodetector. , 2007 .

[26]  F. Xia,et al.  Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects. , 2007, Optics express.

[27]  Guifang Li,et al.  All-optical passive clock extraction of 40 Gbit/s NRZ data using narrow-band filtering. , 2004, Optics express.

[28]  Xianshu Luo,et al.  Double-notch-shaped microdisk resonator-based devices in silicon-on-insulator , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[29]  Qianfan Xu,et al.  12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators. , 2007, Optics express.

[30]  Omri Raday,et al.  Low-threshold continuous-wave Raman silicon laser , 2007 .

[31]  J Fedeli,et al.  Optical manipulation of microparticles and cells on silicon nitride waveguides. , 2005, Optics express.

[32]  M. Lipson,et al.  Optical manipulation of nanoparticles and biomolecules in sub-wavelength slot waveguides , 2009, Nature.

[33]  Koji Yamada,et al.  A monolithic integration of Ge photodiodes with Si variable optical attenuators , 2009, 2009 6th IEEE International Conference on Group IV Photonics.

[34]  Xianshu Luo,et al.  50-element cascaded-resonator devices with gapless non-evanescent coupling using double-notch-shaped microdisks on a silicon chip , 2008, 2008 5th IEEE International Conference on Group IV Photonics.

[35]  Hui Chen,et al.  Cascaded Microresonator-Based Matrix Switch for Silicon On-Chip Optical Interconnection , 2009, Proceedings of the IEEE.

[36]  Linjie Zhou,et al.  NRZ-to-PRZ format conversion using silicon second-order coupled-microring resonator-based notch filters , 2007, 2007 Conference on Lasers and Electro-Optics (CLEO).

[37]  F. Xia,et al.  High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks , 2008 .

[38]  A. Poon,et al.  Silicon cross-connect filters using microring resonator coupled multimode-interference-based waveguide crossings. , 2008, Optics express.

[39]  J. Wilkinson,et al.  Sorting of polystyrene microspheres using a Y-branched optical waveguide. , 2005, Optics express.

[40]  Jurgen Michel,et al.  High performance, waveguide integrated Ge photodetectors. , 2007, Optics express.

[41]  M. Lipson,et al.  Integrated GHz silicon photonic interconnect with micrometer-scale modulators and detectors. , 2009, Optics express.

[42]  Chao Li,et al.  Microresonator-based devices on a silicon chip: novel shaped cavities and resonance coherent interference , 2009 .

[43]  Nahum Izhaky,et al.  High-speed optical modulation based on carrier depletion in a silicon waveguide. , 2007, Optics express.

[44]  Xianshu Luo,et al.  Coupled spiral-shaped microdisk resonators with asymmetric non-evanescent coupling , 2007, 2007 4th IEEE International Conference on Group IV Photonics.

[45]  Xianshu Luo,et al.  Dual-microring resonator-coupled cross-connect switch element for on-chip optical interconnection , 2009, 2009 14th OptoElectronics and Communications Conference.

[46]  Christopher Batten,et al.  Building Manycore Processor-to-DRAM Networks with Monolithic Silicon Photonics , 2008, 2008 16th IEEE Symposium on High Performance Interconnects.