Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment

This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor. The second type is a capacitive pressure sensor, which is based on changes of the capacitance values between two electrodes: one electrode is fixed and the other is movable under an applied pressure. The design was primarily focused on low power consumption. Reliable operation in the presence of disturbances, like electromagnetic interference, parasitic capacitances, etc., proved to be contradictory constraints. A piezoresistive ceramic pressure sensor with a high bridge impedance was chosen for use in a wireless pressure-monitoring system and an acceptable solution using energy-harvesting techniques has been achieved. The described solution allows for the integration of a sensor element with an energy harvester that has a printed thick-film battery and complete electronics in a single substrate packaged inside a compact housing.

[1]  Torsten Thelemann,et al.  Using LTCC for microsystems , 2002 .

[2]  Mario Ricardo Gongora-Rubio,et al.  Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST) , 2001 .

[3]  W. Smetana,et al.  A Wireless Embedded Resonant Pressure Sensor Fabricated in the Standard LTCC Technology , 2009, IEEE Sensors Journal.

[4]  Robert Puers,et al.  Capacitive sensors: When and how to use them☆ , 1993 .

[5]  M Gongora Rubio,et al.  OVERVIEW OF LOW TEMPERATURE COFIRED CERAMICS TAPE TECHNOLOGY FOR MESO-SYSTEM TECHNOLOGY (MSST) , 2000 .

[6]  Craig A. Grimes,et al.  Design and application of a wireless, passive, resonant-circuit environmental monitoring sensor , 2001 .

[7]  Daniel E. Quevedo,et al.  Energy Efficient State Estimation With Wireless Sensors Through the Use of Predictive Power Control and Coding , 2010, IEEE Transactions on Signal Processing.

[8]  Srecko Macek,et al.  The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor , 2010 .

[9]  Marina Santo Zarnik,et al.  Packaging technologies for pressure‐sensors , 2002 .

[10]  Khaldoun Al Agha,et al.  Which Wireless Technology for Industrial Wireless Sensor Networks? The Development of OCARI Technology , 2009, IEEE Transactions on Industrial Electronics.

[11]  L. Golonka,et al.  LTCC Microfluidic System , 2006 .

[12]  Artur Dybko,et al.  LTCC based microfluidic system with optical detection , 2005 .

[13]  H. S. Wolff,et al.  iRun: Horizontal and Vertical Shape of a Region-Based Graph Compression , 2022, Sensors.

[14]  Peter Ryser,et al.  Fabrication of Low‐Temperature Co‐Fired Ceramics Micro‐Fluidic Devices Using Sacrificial Carbon Layers , 2005 .

[15]  Gerhard P. Hancke,et al.  Opportunities and Challenges of Wireless Sensor Networks in Smart Grid , 2010, IEEE Transactions on Industrial Electronics.

[16]  Thomas Maeder,et al.  Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics† , 2010, Sensors.

[17]  Murat Okandan,et al.  Novel Microsystem Applications with New Techniques in Low‐Temperature Co‐Fired Ceramics , 2005 .

[18]  David E. Culler,et al.  Perpetual environmentally powered sensor networks , 2005, IPSN 2005. Fourth International Symposium on Information Processing in Sensor Networks, 2005..

[19]  Craig A. Grimes,et al.  The frequency response of magnetoelastic sensors to stress and atmospheric pressure , 2000 .

[20]  서장후,et al.  Energy Harvesting , 2013 .