Simulative study of vertical cavity with distributed feedback optical sources coupling to fiber systems evaluation

Abstract This paper has demonstrated the simulative study of vertical cavity with distributed feedback light sources coupling to the fiber systems. The simulative study of piezoresistive, capacitive and piezoelectric sensing for micro electro mechanical system has been clarified. The span against the diaphragm thickness for the square diaphragm, round diaphragm, a round bossed diaphragm and rectangular diaphragm is clarified. Acceleration against displacement for a capacitive accelerometer for step signal based on signal sided and double sided is reported. Besides, acceleration against max pulse time for a capacitive accelerometer is outlined. The frequency response plot for a piezoelectric accelerometer under longitudinal load and for thin film based piezoelectric accelerometer is demonstrated based on MEMSolver simulation software version 3.3.

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