Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels.

Sacrificially etched 2-D nanofluidic channels and nanospaces with integrated floor and ceiling electrodes and arbitrary channel geometries have been demonstrated with channel heights from 20 nm to 400 nm, widths from 800 nm to 40 microm, and lengths up to 3 mm, using SU-8 as the channel structural material.

[1]  Albert van den Berg,et al.  Capillarity Induced Negative Pressure of Water Plugs in Nanochannels , 2003 .

[2]  Two particle enhanced nano Raman microscopy and spectroscopy. , 2007, Nano letters.

[3]  M. Tijero,et al.  Novel three-dimensional embedded SU-8 microchannels fabricated using a low temperature full wafer adhesive bonding , 2004 .

[4]  Yuyuan Tian,et al.  Measurement of Single-Molecule Resistance by Repeated Formation of Molecular Junctions , 2003, Science.

[5]  Surface functionalization through adsorption of organic molecules , 2007 .

[6]  D. Arrigan.  Nanoelectrodes, nanoelectrode arrays and their applications. , 2004, The Analyst.

[7]  A. Bard,et al.  Scanning electrochemical microscopy. Introduction and principles , 1989 .

[8]  Helene Andersson,et al.  Microtechnologies and nanotechnologies for single-cell analysis. , 2004, Current opinion in biotechnology.

[9]  Hua-Zhong Yu,et al.  Electrochemical investigation of DNA-modified surfaces: From quantitation methods to experimental conditions , 2007 .

[10]  Pascal Silberzan,et al.  From the Cover: The dynamics of genomic-length DNA molecules in 100-nm channels. , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[11]  B. R. Johnson,et al.  All-optical nanoscale pH meter. , 2006, Nano letters.

[12]  Maxim Zalalutdinov,et al.  Fabrication of flexible polymer tubes for micro and nanofluidic applications , 2002 .

[13]  Lisen Wang,et al.  Side-Wall Vertical Electrodes for Lateral Field Microfluidic Applications , 2007, Journal of Microelectromechanical Systems.

[14]  G. Cheng,et al.  Design and fabrication of a hybrid nanofluidic channel , 2005 .

[15]  R. Schasfoort,et al.  Field-effect flow control for microfabricated fluidic networks , 1999, Science.

[16]  Takehiko Kitamori,et al.  Nanochannels on a Fused-Silica Microchip and Liquid Properties Investigation by Time-Resolved Fluorescence Measurements , 2002 .

[17]  A. Manz,et al.  Electrophoretic manipulation of single DNA molecules in nanofabricated capillaries. , 2004, Lab on a chip.

[18]  J. Eijkel,et al.  1-D nanochannels fabricated in polyimide. , 2004, Lab on a chip.

[19]  Jane E. Curtin,et al.  Nanochannel fabrication for chemical sensors , 1997 .

[20]  W. Miles Clift,et al.  Removal of SU-8 photoresist for thick film applications , 2002 .

[21]  H. Craighead,et al.  Suspended glass nanochannels coupled with microstructures for single molecule detection , 2005 .

[22]  S. Fonash,et al.  Nano- and microchannel fabrication using column/void network deposited silicon , 2001 .

[23]  J. Eijkel,et al.  Technologies for nanofluidic systems: top-down vs. bottom-up--a review. , 2005, Lab on a chip.

[24]  Anja Boisen,et al.  Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold , 2005 .

[25]  H. Craighead.  Future lab-on-a-chip technologies for interrogating individual molecules , 2006, Nature.