Error compensation of grating interferometer due to angular error of linear stage

Linear Diffraction Grating Interferometer (LDGI) is a long stroke and nanometer resolution displacement sensor for any linear stages. The principle of this diffractive interferometer is based on the Littrow configuration and phase information encoded by the ±1st order beams diffracted by a holographic grating. Because the emitted beams are separated on the grating plane, the yaw error of the stage during motion will cause the optical path difference of the two beams resulting in phase shift. This study investigates the influence of the yaw error. Experiments show that after yaw error compensation, the LDGI readings can be significantly improved.

[1]  Janez Možina,et al.  Optimization of displacement-measuring quadrature interferometers considering the real properties of optical components. , 2011, Applied optics.

[2]  Mark L. Schattenburg,et al.  The critical role of metrology in nanotechnology , 2002, Workshop on Nanostructure Science, Metrology, and Technology.

[3]  Kuang-Chao Fan,et al.  Design of a digital controller for long-stroke submicron positioning stage , 2004 .

[4]  Kuang-Chao Fan,et al.  A displacement spindle in a micro/nano level , 2007 .

[5]  Kaiwei Wang,et al.  Double-grating frequency shifter for low-coherence heterodyne interferometry , 2005 .

[6]  Olivier Parriaux,et al.  Compact diffractive interferometric displacement sensor in reflection , 2002 .

[7]  Cheng Xiao.  Review on optical nanometrology , 1999 .

[8]  Grating interferometry with a semiconductor light source. , 1997, Applied optics.

[9]  Kuang-Chao Fan,et al.  Error analysis for a diffraction grating interferometric stylus probing system , 2001 .

[10]  Kuang-Chao Fan,et al.  Linear diffraction grating interferometer with high alignment tolerance and high accuracy. , 2011, Applied optics.

[11]  Shanghong Zhao,et al.  TECHNICAL DESIGN NOTE: Research on long-range grating interferometry with nanometer resolution , 2008 .

[12]  F M Gerasimov.  Use of diffraction gratings for controlling a ruling engine. , 1967, Applied optics.

[13]  S. Rautian.  On the theory of interferometers with diffraction gratings , 2002 .

[14]  N. Bobroff.  Recent advances in displacement measuring interferometry , 1993 .

[15]  Kuang-Chao Fan,et al.  Diffractive Laser Encoder with a Grating in Littrow Configuration , 2008 .

[16]  John A. Kramar.  Nanometer Resolution Metrology with the NIST Molecular Measuring Machine , 2005 .

[17]  Kuang-Chao Fan,et al.  A linear diffraction grating interferometer with high accuracy , 2006, International Symposium on Precision Mechanical Measurements.