Two-wavelength Talbot effect and its application for three-dimensional step-height measurement.

The phenomenon of Talbot self-image shift by changing the wavelength of the illuminating light is described and demonstrated experimentally. A periodic grating is illuminated by light with wavelengths lambda1 and lambda2 generated by two lasers, and the Talbot self-images are recorded along the longitudinal direction at individual wavelengths. The Talbot self-image shift due to the change in the wavelength of light is implemented for the measurement of the three-dimensional step height of a large discontinuous object without any phase ambiguity problem. Fourier-transform fringe analysis was used to determine the maximum contrast of the high-visibility bands for the measurement of the step height of the object. The main advantages of the proposed system are nonmechanical scanning, high stability because of its common path geometry, compactness, and a wide range of measurement as compared to interferometric three- dimensional profilers.

[1]  W. Talbot.  Facts relating to optical science , 1836 .

[2]  R Onodera,et al.  Two-wavelength laser-diode interferometry that uses phase-shifting techniques. , 1991, Optics letters.

[3]  H. L. Kung,et al.  Transform spectrometer based on measuring the periodicity of Talbot self-images. , 2001, Optics letters.

[4]  Chandra Shakher,et al.  Surface profiling using phase shifting Talbot interferometric technique , 2005 .

[5]  K. Creath.  Step height measurement using two-wavelength phase-shifting interferometry. , 1987, Applied optics.

[6]  Mitsuo Takeda,et al.  Spectral interferometric microscope with tandem liquid-crystal Fabry-Perot interferometers for extension of the dynamic range in three-dimensional step-height measurement. , 2003, Applied optics.

[7]  Jérôme Primot,et al.  Talbot experiment re-examined: demonstration of an achromatic and continuous self-imaging regime , 2000 .

[8]  J R Leger,et al.  Real-time depth measurement and display using Fresnel diffraction and white-light processing. , 1984, Applied optics.

[9]  M. Takeda,et al.  Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry , 1982 .

[10]  Mitsuo Takeda,et al.  Spectral interference Mirau microscope with an acousto-optic tunable filter for three-dimensional surface profilometry. , 2003, Applied optics.

[11]  Y. Ishii,et al.  Two-wavelength interferometry that uses a fourier-transform method. , 1998, Applied optics.

[12]  G Häusler,et al.  Acquisition of 3-D data by focus sensing. , 1988, Applied optics.

[13]  J. Wyant,et al.  Multiple-wavelength phase-shifting interferometry. , 1985, Applied optics.

[14]  Dario Ambrosini,et al.  Displacement measurement using the Talbot effect with a Ronchi grating , 2002 .

[15]  H J Tiziani,et al.  Dual-wavelength heterodyne differential interferometer for high-precision measurements of reflective aspherical surfaces and step heights. , 1996, Applied optics.

[16]  Mitsuo Takeda,et al.  Absolute 3-D shape measurements using coaxial and coimage plane optical systems and Fourier fringe analysis for focus detection , 2000 .

[17]  E. E. Sicre,et al.  Real-time measurement of the meniscus shape using the Talbot effect , 1993 .

[18]  T C Strand,et al.  Range measurement using Talbot diffraction imaging of gratings. , 1984, Applied optics.

[19]  R G Dorsch,et al.  Profilometry by phase-shifted Talbot images. , 1994, Applied optics.

[20]  P. Groot.  Extending the unambiguous range of two-color interferometers , 1994 .

[21]  J C Wyant,et al.  Two-wavelength phase shifting interferometry. , 1984, Applied optics.

[22]  Jérôme Primot,et al.  Talbot experiment re-examined: study of the chromatic regime and application to spectrometry. , 2003, Optics express.

[23]  J C Wyant,et al.  Testing aspherics using two-wavelength holography. , 1971, Applied optics.

[24]  M. Takeda,et al.  Lateral aberration measurements with a digital Talbot interferometer. , 1984, Applied optics.

[25]  R. Dändliker,et al.  Two-wavelength laser interferometry using superheterodyne detection. , 1988, Optics letters.

[26]  H. Matsumoto.  Synthetic interferometric distance-measuring system using a CO2 laser. , 1986, Applied optics.

[27]  Chandra Shakher,et al.  Measurement of focal length with phase-shifting Talbot interferometry. , 2005, Applied optics.

[28]  Mitsuo Takeda,et al.  Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope. , 2002, Applied optics.

[29]  R. Rodriguez-Vera,et al.  3-D Contouring of Diffuse Objects by Talbot-projected Fringes , 1991 .

[30]  C Polhemus,et al.  Two-wavelength interferometry. , 1973, Applied optics.

[31]  Krzysztof Patorski,et al.  I The Self-Imaging Phenomenon and its Applications , 1989 .