论文信息 - Fabrication of a polycrystalline SiGe- and Ge-on-insulator by Ge condensation of amorphous SiGe on a SiO2/Si substrate - 字舞流文

Fabrication of a polycrystalline SiGe- and Ge-on-insulator by Ge condensation of amorphous SiGe on a SiO2/Si substrate

Cheng Li | Songyan Chen | Yuping Zeng | Peng Cui | Guangyang Lin | Jie Zhang | Jianfang Xu | Jianyuan Wang | Zhiwei Huang | Dongxue Liang | Chunyu Yu