论文信息 - The study on metal-insulator-metal capacitor performance improvement

The study on metal-insulator-metal capacitor performance improvement

Metal-insulator-metal capacitor (MIMc) is one of key components in mixed signal (MS) and radio frequency (RF) circuit due to its high performance. In this work, we studied MIMc dielectric, bottom/top plate materials, thickness influence on mismatch, voltage coefficient and temperature coefficient; then a near zero voltage and temperature coefficient stacked MIMc structure was proposed and demonstrated for the first time.

Po Li | Jingwei Peng | David Wei Zhang

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