Reflection high-energy electron diffraction oscillations during epitaxial growth of high-temperature superconducting oxides.

Strong intensity oscillations have been found in reflection high-energy electron diffraction during epitaxial growth of BaTiO{sub 3}, La{sub 2}CuO{sub 4}, and YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} with perovskite-type structures. The oscillation period corresponds to the height of the minimum unit of each oxide that satisfies the chemical composition and electrical neutrality. The data provide a basic understanding of the epitaxial growth process of ionic oxides.