Structural Parameters Studies of Saw-tooth Microvalve in Valveless Micropump

The Finite Element Analysis software Fluent was adopted during numerical simulation.The influence of the instantaneous flux and the steady efficiency under MPH condition were analyzed with the changes of the structural parameters of length,minimum width,depth and diffused angle.The result proves that the change of length has little effect to the performance of the micro channel,the flux and efficiency will enhance with the increase of the depth.The choice of biggish diffused angle is propitious to the increase of the flux and efficiency when the inlet velocity is lower,the lesser diffused angle would be chosen to avoid the boundary separate that would decrease the flux and efficiency when the inlet velocity is larger.