Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: The telegraph effect
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J. Schmitt | L. Derendinger | A. Howling | L. Sansonnens | C. Hollenstein | H. Schmidt | E. Sakanaka
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J. Schmitt | L. Derendinger | A. Howling | L. Sansonnens | C. Hollenstein | H. Schmidt | E. Sakanaka