A robust control approach for MEMS capacitive micromachined ultrasonic transducer

An optimal composite nonlinear feedback control method with integral sliding mode is presented in this paper. The controller extends the travel range of the micro-electromechanical system capacitive micromachined ultrasonic transducer (CMUT). Moreover, enhanced transient response and precise tracking performance is achieved. It is known that CMUT is inherently unstable which results in pull-in phenomenon and it is very sensitive to small perturbations, so one of the major problems is to stabilize the CMUT beyond the pull-in limit with the external disturbances. In addition, the input saturation problem is significant to CMUT. Based on that, a robust control scheme is derived using composite nonlinear feedback control law combined with integral sliding mode control law. Then all the tuning parameters for the proposed control method are converted into a minimization problem and solved by particle swarm optimization algorithm automatically. We verified the effectiveness through extending the travel range of the CMUT gap by three control methods which are proportional integral derivative, composite nonlinear feedback and the method we proposed. The stability and small range tracking performance with three control methods is compared on the pull-in position of CMUT. The simulations show that the proposed control method has desired tracking performance and robustness to external disturbance with input saturation.

[1]  G. Fedder,et al.  Position control of parallel-plate microactuators for probe-based data storage , 2004, Journal of Microelectromechanical Systems.

[2]  Alessandro Pisano,et al.  Sliding mode control: A survey with applications in math , 2011, Math. Comput. Simul..

[3]  Deepak Fulwani,et al.  A Robust Algorithm Against Actuator Saturation using Integral Sliding Mode and Composite Nonlinear Feedback , 2008 .

[4]  P.-C. Eccardt,et al.  Analysis of crosstalk between fluid coupled cmut membranes , 2005, IEEE Ultrasonics Symposium, 2005..

[5]  Leonid M. Fridman,et al.  Analysis and design of integral sliding manifolds for systems with unmatched perturbations , 2006, IEEE Transactions on Automatic Control.

[6]  Yu Xiao,et al.  Optimal composite nonlinear feedback control for a gantry crane system , 2012, Proceedings of the 31st Chinese Control Conference.

[7]  V. Utkin,et al.  Integral sliding mode in systems operating under uncertainty conditions , 1996, Proceedings of 35th IEEE Conference on Decision and Control.

[8]  Guchuan Zhu,et al.  Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: A Simulation Study , 2006, Journal of Microelectromechanical Systems.

[9]  Weiyao Lan,et al.  Speed control of DC motor using composite nonlinear feedback control , 2009, 2009 IEEE International Conference on Control and Automation.

[10]  Cosku Kasnakoglu,et al.  A fractional adaptation law for sliding mode control , 2008 .

[11]  Zhenhao Li,et al.  Capacitive micromachined ultrasonic transducers based on annular cell geometry for air-coupled applications. , 2016, Ultrasonics.

[12]  Butrus T. Khuri-Yakub,et al.  Capacitive Micromachined Ultrasonic Transducers: Theory and Technology , 2003 .

[13]  Yahaya Md Sam,et al.  A linear model of quarter car active suspension system using composite nonlinear feedback control , 2012, 2012 IEEE Student Conference on Research and Development (SCOReD).

[14]  Paul Muralt,et al.  Optimization of the fabrication of sealed capacitive transducers using surface micromachining , 2004 .

[15]  Lili Dong,et al.  Closed-loop voltage control of a parallel-plate MEMS electrostatic actuator , 2010, Proceedings of the 2010 American Control Conference.

[16]  Ben M. Chen,et al.  A Hard-Disk-Drive Servo System Design Using Composite Nonlinear-Feedback Control With Optimal Nonlinear Gain Tuning Methods , 2010, IEEE Transactions on Industrial Electronics.

[17]  D. Graham,et al.  The synthesis of "optimum" transient response: Criteria and standard forms , 1953, Transactions of the American Institute of Electrical Engineers, Part II: Applications and Industry.

[18]  Punitkumar Bhavsar,et al.  Trajectory Tracking of Linear Inverted Pendulum Using Integral Sliding Mode Control , 2012 .

[19]  H. Fujita,et al.  Microactuators and micromachines , 1998, Proc. IEEE.

[20]  I. Ladabaum,et al.  The microfabrication of capacitive ultrasonic transducers , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[21]  Bijnan Bandyopadhyay,et al.  Integral Sliding Mode Based Composite Nonlinear Feedback Control , 2009 .

[22]  R.W. Dutton,et al.  Electrostatic micromechanical actuator with extended range of travel , 2000, Journal of Microelectromechanical Systems.

[23]  Zhijia Zhao,et al.  Vibration control and boundary tension constraint of an axially moving string system , 2017 .

[24]  Tong Heng Lee,et al.  Composite nonlinear feedback control for linear systems with input saturation: theory and an application , 2003, IEEE Trans. Autom. Control..

[25]  I. Ladabaum,et al.  Micromachined ultrasonic transducers (MUTs) , 1995, 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium.

[26]  Jingkuang Chen,et al.  Capacitive micromachined ultrasonic transducer arrays for minimally invasive medical ultrasound , 2010 .

[27]  Butrus T. Khuri-Yakub,et al.  Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers , 1999 .

[28]  F. L. Degertekin,et al.  Harmonic reduction in capacitive micromachined ultrasonic transducers by gap feedback linearization , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[29]  Chao Wu,et al.  Composite nonlinear control with state and measurement feedback for general multivariable systems with input saturation , 2005, Syst. Control. Lett..

[30]  J. Binder,et al.  Fabrication of gap-optimized CMUT , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[31]  R. Eberhart,et al.  Empirical study of particle swarm optimization , 1999, Proceedings of the 1999 Congress on Evolutionary Computation-CEC99 (Cat. No. 99TH8406).

[32]  Lahcen Saydy,et al.  Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties , 2006, 2006 American Control Conference.

[33]  Ben M. Chen,et al.  On selection of nonlinear gain in composite nonlinear feedback control for a class of linear systems , 2007, 2007 46th IEEE Conference on Decision and Control.

[34]  Chao Wu,et al.  Composite nonlinear control with state and measurement feedback for general multivariable systems with input saturation , 2003, 42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475).