论文信息 - Composition dependence of the work function of Ta1−xAlxNy metal gates - 字舞流文

Composition dependence of the work function of Ta1−xAlxNy metal gates

B. Lee | R. Wallace | P. Majhi | R. Jammy | B. Gnade | H. Alshareef | H. Harris | H. Wen | K. Choi | H. Luan | Y. Senzaki | S. Aguirre-Tostado