Low Source/Drain Contact Resistance for AlGaN/GaN HEMTs with High Al Concentration and Si-HP [111] Substrate
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N. Bourzgui | K. Kalna | A. Soltani | H. Maher | B. Benbakhti | W. Zhang | S. Duffy | M. Boucherta | M. Mattalah | M. Bouchilaoun