论文信息 - Ge/ZnS-Based Micromachined Fabry–Perot Filters for Optical MEMS in the Longwave Infrared - 字舞流文

Ge/ZnS-Based Micromachined Fabry–Perot Filters for Optical MEMS in the Longwave Infrared

K. Silva | J. Dell | L. Faraone | J. Antoszewski | M. Martyniuk | K. K. M. D. Dilusha Silva | J. Bumgarner | H. Mao