Performance evaluation of laser trackers using the network method

Abstract Laser trackers (LTs) are widely used for large-scale dimensional metrology. Periodic LT performance evaluation is a key aspect in ensuring measurement reliability. The existing documentary standards for LT performance evaluation require scale bars and special artifacts that are often unavailable for many LT users. A network-based method is considered in this paper as a simple and effective approach to evaluate LT performance without the need for expensive artifacts or reference instruments. In this method, a set of fixed targets are measured from different locations of the LT. The reference values for the lengths between pairs of targets are determined by incorporating the geometrical error model of the LT (i.e., the LT data from each location are corrected for systematic geometric misalignments, quantities that are also obtained from the same data), thus the LT under test is itself used to calibrate the lengths in the network. Subsequently, these length values are used as references to evaluate the LT performance. We validate this method of establishing reference lengths by comparing the values for select lengths in the network against more traditional line-of-sight interferometry. We show that the uncertainties in the reference lengths obtained in this manner are sufficiently small in comparison to the maximum permissible error (MPE) specifications so that they can be used for performance evaluation. A case study using three LTs is presented in this paper. The results obtained from that case study is also verified by a simulation based on the ASME B89.4.19 standard, showing the feasibility of the proposed network-based LT performance evaluation method.

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