Integrated Micro-Nano Level Interdisciplinary Manufacturing Engineering Education for Mems Development

MEMS or Micro Electro-Mechanical Systems are miniaturized mechanical, electrical, and biological devices and systems with a dimensional range within a few micrometers. They represent a novel multidisciplinary technology field with unlimited potential for a wide variety of markets including automobiles, health care, telecommunication, information technology, medicine, defense and space. The current level of development of MEMS is comparable to what the Integrated Circuit or the IC industry achieved three decades ago. Future innovations and advancement are critically dependent on the integration of knowledge from different engineering and science disciplines. Creating and sustaining a work force having requisite interdisciplinary knowledge and skills in engineering, science and micro-fabrication is a major challenge faced by the academic community. The objective of this paper is to summarize the emerging need for incorporating a MEMS based micro-nano level interdisciplinary manufacturing engineering curriculum. The current level of MEMS based education available within various U.S. universities is also analyzed.

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