Embedded Flash on 90nm Logic Technology & Beyond for FPGAs

We have successfully integrated an embedded flash technology into a 90 nm leading edge logic technology to realize superior FPGA products with only 10% additional process steps. The stacked gate memory cell is completely compatible with Cu and a low-k interconnection and has excellent flash reliability. Achieving the same logic performance as the non-embedded technology maximizes the utilization of design resources between the non-embedded technology and the embedded flash technology.