Surface gratings for polarization control of single- and multi-mode oxide-confined vertical-cavity surface-emitting lasers

By etching a surface grating into the semiconductor cap-layer of top-emitting, oxide-confined VCSELs, we have fabricated polarization-stable VCSELs with an emission wavelength of 960 nm, while nominally identical devices on the same sample without a grating show polarization switches. With this technique we can define and stabilize the polarization not only for single-mode, but also for multi-mode VCSELs. We present highly multi-mode VCSELs with 10 mW output power having one common and stable polarization for all modes with a suppression of the orthogonal polarization by 15 dB up to thermal rollover. Combining the surface grating with the surface relief technique, the single-mode output power can be doubled, while the polarization of the VCSELs is well defined and stabilized.

[1]  Rainer Michalzik,et al.  Polarization-controlled monolithic oxide-confined VCSELs , 2004, SPIE Photonics Europe.

[2]  Rainer Michalzik,et al.  Monolithic polarization control of multimode VCSELs by a dielectric surface grating , 2004, SPIE OPTO.

[3]  Pierluigi Debernardi,et al.  Three-dimensional model for vectorial fields in vertical-cavity surface-emitting lasers , 2001 .

[4]  Benjamin Dwir,et al.  Vertical cavity surface emitting lasers incorporating structured mirrors patterned by electron-beam lithography , 1999 .

[5]  Hugo Thienpont,et al.  Impact of in-plane anisotropic strain on the polarization behavior of vertical-cavity surface-emitting lasers , 2000 .

[6]  Yong-Hee Lee,et al.  Polarization stabilization of vertical‐cavity top‐surface‐emitting lasers by inscription of fine metal‐interlaced gratings , 1995 .

[7]  J. Gustavsson,et al.  Single fundamental-mode output power exceeding 6 mW from VCSELs with a shallow surface relief , 2004, IEEE Photonics Technology Letters.

[8]  J. P. Woerdman,et al.  ELECTRO-OPTIC EFFECT AND BIREFRINGENCE IN SEMICONDUCTOR VERTICAL-CAVITY LASERS , 1997 .

[9]  K. Choquette,et al.  Control of vertical-cavity laser polarization with anisotropic transverse cavity geometries , 1994, IEEE Photonics Technology Letters.

[10]  J. Woodhead,et al.  Electrical polarization control of vertical-cavity surface-emitting lasers using polarized feedback and a liquid crystal , 1999, IEEE Photonics Technology Letters.

[11]  Salvador Balle,et al.  Combined effects of semiconductor gain dynamics, spin dynamics, and thermal shift in polarization selection in VCSELs , 2000, Photonics West - Optoelectronic Materials and Devices.

[12]  R. Michalzik,et al.  Reliable polarization control of VCSELs through monolithically integrated surface gratings: a comparative theoretical and experimental study , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[13]  Hugo Thienpont,et al.  Polarization behavior of vertical-cavity surface-emitting lasers: Experiments, models and applications , 2001 .

[14]  San Miguel M,et al.  Light-polarization dynamics in surface-emitting semiconductor lasers. , 1995, Physical review. A, Atomic, molecular, and optical physics.

[15]  Kenichi Iga,et al.  Lasing characteristics of InGaAs-GaAs polarization controlled vertical-cavity surface-emitting laser grown on GaAs [311] B substrate , 1999 .

[16]  Pierluigi Debernardi,et al.  Coupled mode theory: a powerful tool for analyzing complex VCSELs and designing advanced device features , 2003 .

[17]  A. Larsson,et al.  Transverse mode selection in large-area oxide-confined vertical-cavity surface-emitting lasers using a shallow surface relief , 1999, IEEE Photonics Technology Letters.

[18]  H. J. Unold,et al.  Long monolithic cavity VCSELs for high singlemode output power , 2001 .

[19]  H. J. Unold,et al.  Increased-area oxidised single-fundamental mode VCSEL with self-aligned shallow etched surface relief , 1999 .

[20]  J. Mork,et al.  Synchronization phase diagrams of monolithic colliding pulse-modelocked lasers , 1996, IEEE Photonics Technology Letters.

[21]  Kenichi Iga,et al.  Polarization control of vertical-cavity surface emitting lasers using a birefringent metal/dielectric polarizer loaded on top distributed Bragg reflector , 1995 .

[22]  J. P. Woerdman,et al.  Elasto‐optic anisotropy and polarization orientation of vertical‐cavity surface‐emitting semiconductor lasers , 1996 .