베르누이 원리를 이용한 비접촉 이송장치에 관한 연구

semiconductor devices are transferred to a transport system, according to the present invention consists of multiple stages of the sub-stage (stage) of a plane parked on the semiconductor device between multiple. semiconductor devices to control the gap between the number of 1 tray (tray) above the transfer device to the stage as part of the Stage 1 and above the device spaced above the stage in a number of minor remind them of the semiconductor device tray and transferred to Stage 2.