Highly Robust Transparent and Conductive Gas Diffusion Barriers Based on Tin Oxide

Transparent and electrically conductive gas diffusion barriers are reported. Tin oxide (SnOx ) thin films grown by atomic layer deposition afford extremely low water vapor transmission rates (WVTR) on the order of 10(-6) g (m(2) day)(-1) , six orders of magnitude better than that established with ITO layers. The electrical conductivity of SnOx remains high under damp heat conditions (85 °C/85% relative humidity (RH)), while that of ZnO quickly degrades by more than five orders of magnitude.

[1]  M. Zeman,et al.  Influence of the atmospheric species water, oxygen, nitrogen and carbon dioxide on the degradation of aluminum doped zinc oxide layers , 2014 .

[2]  Jae Ik Kim,et al.  Quantitative analyses of damp-heat-induced degradation in transparent conducting oxides , 2014 .

[3]  Aron Walsh,et al.  Atomistic Origins of High-Performance in Hybrid Halide Perovskite Solar Cells , 2014, Nano letters.

[4]  C. Brabec,et al.  Accelerated degradation of Al3+ doped ZnO thin films using damp heat test , 2014 .

[5]  A. Umarji,et al.  Defect induced optical bandgap narrowing in undoped SnO2 nanocrystals , 2013 .

[6]  F. Roozeboom,et al.  On the environmental stability of ZnO thin films by spatial atomic layer deposition , 2013 .

[7]  S. Bent,et al.  Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water , 2013 .

[8]  Ching-Chiun Wang,et al.  Transparent Conductive Gas‐Permeation Barriers on Plastics by Atomic Layer Deposition , 2013, Advanced materials.

[9]  Su-Huai Wei,et al.  Realizing a SnO2-based ultraviolet light-emitting diode via breaking the dipole-forbidden rule , 2012 .

[10]  R. McLean,et al.  Permeability and corrosion in ZrO2/Al2O3 nanolaminate and Al2O3 thin films grown by atomic layer deposition on polymers , 2012 .

[11]  R. Gordon,et al.  Atomic layer deposition of tin oxide with nitric oxide as an oxidant gas , 2012 .

[12]  H. Lifka,et al.  Cathode encapsulation of organic light emitting diodes by atomic layer deposited Al2O3 films and Al2O3/a-SiNx:H stacks , 2012 .

[13]  C. Ballif,et al.  Humid environment stability of low pressure chemical vapor deposited boron doped zinc oxide used as transparent electrodes in thin film silicon solar cells , 2011 .

[14]  Wolfgang Kowalsky,et al.  Efficient large area semitransparent organic solar cells based on highly transparent and conductive ZTO/Ag/ZTO multilayer top electrodes☆ , 2011 .

[15]  Olle Inganäs,et al.  Organic photovoltaics: Avoiding indium , 2011 .

[16]  Peter Francis Carcia,et al.  Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers , 2010 .

[17]  R. Gordon,et al.  Low Temperature Atomic Layer Deposition of Tin Oxide , 2010 .

[18]  A. Kahn,et al.  The origin of low water vapor transmission rates through Al2O3/ZrO2 nanolaminate gas-diffusion barriers grown by atomic layer deposition , 2010 .

[19]  Arrelaine A. Dameron,et al.  Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition , 2009 .

[20]  Wolfgang Kowalsky,et al.  Al2O3/ZrO2 Nanolaminates as Ultrahigh Gas‐Diffusion Barriers—A Strategy for Reliable Encapsulation of Organic Electronics , 2009 .

[21]  V. Pruneri,et al.  Widely transparent electrodes based on ultrathin metals. , 2009, Optics letters.

[22]  Wolfgang Kowalsky,et al.  Indium-free transparent organic light emitting diodes with Al doped ZnO electrodes grown by atomic layer and pulsed laser deposition , 2008 .

[23]  Matthias Scheffler,et al.  Sources of electrical conductivity in SnO2. , 2008, Physical review letters.

[24]  J. Hupp,et al.  Atomic layer deposition of tin oxide films using tetrakis(dimethylamino) tin , 2008 .

[25]  T. Riedl,et al.  Highly efficient simplified organic light emitting diodes , 2007 .

[26]  Steven M. George,et al.  Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers , 2006 .

[27]  U. Diebold,et al.  The surface and materials science of tin oxide , 2005 .

[28]  Karsten Heuser,et al.  Permeation rate measurements by electrical analysis of calcium corrosion , 2003 .

[29]  Y. Leterrier.  Durability of nanosized oxygen-barrier coatings on polymers , 2003 .

[30]  Wendy D. Bennett,et al.  Gas permeation and lifetime tests on polymer-based barrier coatings , 2001, SPIE Optics + Photonics.

[31]  B. M. Henry,et al.  Characterization of transparent aluminium oxide and indium tin oxide layers on polymer substrates , 2001 .

[32]  M. Rubin,et al.  Ellipsometry on sputter-deposited tin oxide films: optical constants versus stoichiometry, hydrogen content, and amount of electrochemically intercalated lithium. , 1998, Applied optics.

[33]  R. Helbig,et al.  Growth of SnO2 single crystals by a vapour phase reaction method , 1976 .