Micro-Vibration-Proof Design for IC Fab

Micro-contamination control is the hardcore in IC fab engineering design. Being the vibration contamination control, micro-vibration-proof plays an important role in the engineering design. The micro-vibration-proof technology involves quite some links. In this paper, we suggest that based on the site tests and the project experience, hold major links and follow the systematic ideas so as to find better solution for solving the problems in micro-vibration-proof.