A Review of Stick–Slip Nanopositioning Actuators

There is a surge in the development of actuators based on the stick–slip of piezoelectric actuators in the past decade for the advantages of nanoscale resolution and long travel distances. These actuators, termed PSTA (piezoelectric stick–slip actuators), are widely used in chip assembly and cell manipulation. This chapter provides a comprehensive review of PSTA systems. Reported PSTAs are generalized with two specific principles which can be considered as a framework to further classify other PSTAs. In addition, the applications of PSTAs are categorized into two groups according to the number of degrees of freedom (DOF). This chapter also discusses driving signals to actuate different structures of PSTAs and control methods to achieve high positioning resolutions.

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