论文信息 - High-Aspect-Ratio Ruthenium Lines for Buried Power Rail - 字舞流文

High-Aspect-Ratio Ruthenium Lines for Buried Power Rail

Christopher J. Wilson | C. Adelmann | N. Heylen | O. Pedreira | J. Bommels | Z. Tokei | I. Ciofi | L. Teugels | S. Kundu | Anshul Gupta | G. Jamieson | B. Chava