Preparation of TiO2-anatase film on Si(001) substrate with TiN and SrTiO3 as buffer layers

An epitaxial TiO2-anatase thin film was grown on the Si(001) substrate with SrTiO3/TiN as the buffer layers by the pulsed laser deposition technique under an oxygen gas supply. The typical thicknesses of TiO2-anatase, SrTiO3 and TiN layers were 760 nm, 450 nm and 230 nm, respectively. The characterization of the epitaxial TiO2-anatase film was performed using the x-ray diffraction method. The crystallographic relationships between the TiO2-anatase film and SrTiO3/TiN buffer layers were analysed by the θ-2θ scan and pole figure measurement. The growth direction of the films was determined as TiO2001/SrTiO3001/TiN001/Si001 and their in-plane relationship TiO2{110}||SrTiO3{100}||TiN{100}||Si{100}. The crystalline quality of TiO2-anatase was examined by the rocking curve analysis. The composition of the thin film packaging was characterized by Rutherford backscattering spectrometry (RBS) using a 2.0 MeV 4He beam. The simulation of the RBS data points to the possible intermixing of Ti (from TiN) and Si.

[1]  A. Kinbara,et al.  Process effects on structural properties of TiO2 thin films by reactive sputtering , 1992 .

[2]  P. Falaras,et al.  Preparation, fractal surface morphology and photocatalytic properties of TiO2 films , 1999 .

[3]  L. Kavan,et al.  Orientation Dependence of Charge‐Transfer Processes on TiO2 (Anatase) Single Crystals , 2000 .

[4]  Seshu B. Desu,et al.  Brookite-rich titania films made by pulsed laser deposition , 2000 .

[5]  H. Kubota,et al.  ION-BEAM MODIFICATION OF TIO2 FILM TO MULTILAYERED PHOTOCATALYST , 1999 .

[6]  Zhi-guo Liu,et al.  Epitaxial growth of dielectric SrTiO 3 thin films by pulsed laser deposition , 1999 .

[7]  M. Grätzel,et al.  A low-cost, high-efficiency solar cell based on dye-sensitized colloidal TiO2 films , 1991, Nature.

[8]  Dieter Mergel,et al.  Density and refractive index of TiO2 films prepared by reactive evaporation , 2000 .

[9]  B. Cullity,et al.  Elements of X-ray diffraction , 1957 .

[10]  Alfonso Franciosi,et al.  Ultrahigh vacuum metalorganic chemical vapor deposition growth and in situ characterization of epitaxial TiO2 films , 1993 .

[11]  G. K. Wolf.  Modification of chemical properties of materials by ion beam mixing and ion beam assisted deposition , 1992 .

[12]  C. Choy,et al.  Epitaxial growth of SrTiO3 films with different orientations on TiN buffered Si(001) by pulsed laser deposition , 2000 .

[13]  J. Yates,et al.  Photocatalysis on TiO2 Surfaces: Principles, Mechanisms, and Selected Results , 1995 .

[14]  Y. Leprince-Wang,et al.  Relations between the optical properties and the microstructure of TiO2 thin films prepared by ion-assisted deposition , 2000 .

[15]  J. Takada,et al.  Characteristics of titanium oxide films deposited by an activated reactive evaporation method , 1994 .