Overview of Advanced Micro-Nano Manufacturing Technologies for Triboelectric Nanogenerators

In the era of the Internet of Things, various electronics play an important role in information interaction, in which the power supply is an urgent problem to be solved. Triboelectric nanogenerator (TENG) is an emerging mechanical energy harvesting technology that can serve as a power source for electronics, which is developing towards high performance, miniaturization and integration. Herein, the advanced micro-nano manufacturing technologies are systematically reviewed for TENGs. First, film preparation such as physical vapor deposition, chemical vapor deposition, electrochemical deposition, electrospinning and screen printing for triboelectric layers are introduced and discussed. Then, surface processing, such as soft lithography, laser ablation, inductively coupled plasma and nanoimprint for micro-nano structures on the surface of triboelectric layers are also introduced and discussed. In addition, micro-electromechanical system fabrication for TENG devices such as acoustic and vibration sensors, is introduced, and their current challenges are analyzed. Finally, the challenges of the advanced micro-nano manufacturing technologies for the TENGs are systematically summarized, and further development is prospected.