Transient measurements on miniaturized diaphragm pumps in microfluid systems

In this paper the dynamics of miniaturized diaphragm pumps will be investigated by transient pressure measurements on the millisecond time scale. The results will be compared with simulations. It will be shown that there is a strong interaction between the dynamics of miniaturized diaphragm pumps and the geometry of the connected fluid channels, caused by the inertia of the fluid.