Germanium-based integrated photonics from near- to mid-infrared applications

Abstract Germanium (Ge) has played a key role in silicon photonics as an enabling material for datacom applications. Indeed, the unique properties of Ge have been leveraged to develop high performance integrated photodectors, which are now mature devices. Ge is also very useful for the achievement of compact modulators and monolithically integrated laser sources on silicon. Interestingly, research efforts in these domains also put forward the current revolution of mid-IR photonics. Ge and Ge-based alloys also present strong advantages for mid-infrared photonic platform such as the extension of the transparency window for these materials, which can operate at wavelengths beyond 8 μm. Different platforms have been proposed to take benefit from the broad transparency of Ge up to 15 μm, and the main passive building blocks are now being developed. In this review, we will present the most relevant Ge-based platforms reported so far that have led to the demonstration of several passive and active building blocks for mid-IR photonics. Seminal works on mid-IR optical sensing using integrated platforms will also be reviewed.

[1]  M. Nedeljkovic,et al.  Free-Carrier Electrorefraction and Electroabsorption Modulation Predictions for Silicon Over the 1–14- $\mu\hbox{m}$ Infrared Wavelength Range , 2011, IEEE Photonics Journal.

[2]  Wei Du,et al.  Si-Based GeSn Lasers with Wavelength Coverage of 2–3 μm and Operating Temperatures up to 180 K , 2017 .

[3]  Pavel Cheben,et al.  Germanium-on-silicon mid-infrared grating couplers with low-reflectivity inverse taper excitation. , 2016, Optics letters.

[4]  Richard A. Soref,et al.  Germanium-on-silicon nitride waveguides for mid-infrared integrated photonics , 2016 .

[5]  David A B Miller,et al.  Low-voltage broad-band electroabsorption from thin Ge/SiGe quantum wells epitaxially grown on silicon. , 2013, Optics express.

[6]  M. Oehme,et al.  GeSn/Ge multiquantum well photodetectors on Si substrates. , 2014, Optics letters.

[7]  Mitsuru Takenaka,et al.  Focusing subwavelength grating coupler for mid-infrared suspended membrane germanium waveguides. , 2017, Optics letters.

[8]  Ashok V. Krishnamoorthy,et al.  Design and fabrication of 3μm silicon-on-insulator waveguide integrated Ge electro-absorption modulator. , 2011, Optics express.

[9]  Michal Lipson,et al.  Low-loss silicon platform for broadband mid-infrared photonics , 2017, 1703.03517.

[10]  I Molina-Fernández,et al.  Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding. , 2016, Optics express.

[11]  Mitsuru Takenaka,et al.  Mid-infrared germanium photonic crystal cavity. , 2017, Optics letters.

[12]  M. Lončar,et al.  Silicon photonic devices for mid-infrared applications , 2014 .

[13]  Gunther Roelkens,et al.  Silicon-Based Photonic Integration Beyond the Telecommunication Wavelength Range , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[14]  Benjamin J Eggleton,et al.  Silicon-on-sapphire pillar waveguides for Mid-IR supercontinuum generation. , 2015, Optics express.

[15]  Ross Stanley,et al.  Plasmonics in the mid-infrared , 2012, Nature Photonics.

[16]  Mathieu Carras,et al.  Low loss SiGe graded index waveguides for mid-IR applications. , 2014, Optics express.

[17]  Frederic Boeuf,et al.  QPSK Modulation in the O-Band Using a Single Dual-Drive Mach–Zehnder Silicon Modulator , 2018, Journal of Lightwave Technology.

[18]  Virginie Nazabal,et al.  Optical characterization at 7.7 µm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared. , 2016, Optics express.

[19]  Richard A. Soref,et al.  The third-order nonlinear optical coefficients of Si, Ge, and Si1−xGex in the midwave and longwave infrared , 2011 .

[20]  Jifeng Liu Monolithically Integrated Ge-on-Si Active Photonics , 2014 .

[21]  Chongjin Xie,et al.  112-Gb/s monolithic PDM-QPSK modulator in silicon. , 2012, Optics express.

[22]  D. Thomson,et al.  50-Gb/s Silicon Optical Modulator , 2012, IEEE Photonics Technology Letters.

[23]  M. Morse,et al.  31 GHz Ge n-i-p waveguide photodetectors on Silicon-on-Insulator substrate. , 2007, Optics express.

[24]  C R Doerr,et al.  Monolithically Integrated 40-Wavelength Demultiplexer and Photodetector Array on Silicon , 2011, IEEE Photonics Technology Letters.

[25]  R. Loo,et al.  Germanium-on-Silicon Mid-Infrared Arrayed Waveguide Grating Multiplexers , 2013, IEEE Photonics Technology Letters.

[26]  Delphine Marris-Morini,et al.  Electro-refractive effect in Ge/SiGe multiple quantum wells , 2013 .

[27]  Gunther Roelkens,et al.  Ge-on-Si and Ge-on-SOI thermo-optic phase shifters for the mid-infrared. , 2014, Optics express.

[28]  Jérôme Faist,et al.  Analysis of enhanced light emission from highly strained germanium microbridges , 2013, Nature Photonics.

[29]  Winnie N. Ye,et al.  Wideband Ge-Rich SiGe Polarization-Insensitive Waveguides for Mid-Infrared Free-Space Communications , 2018, Applied Sciences.

[30]  Gunther Roelkens,et al.  56 Gb/s Germanium Waveguide Electro-Absorption Modulator , 2016, Journal of Lightwave Technology.

[31]  Jurgen Michel,et al.  High performance, waveguide integrated Ge photodetectors. , 2007, Optics express.

[32]  Vien Van,et al.  Silicon photonic dual-gas sensor for H2 and CO2 detection. , 2017, Optics express.

[33]  R. Soref Mid-infrared photonics in silicon and germanium , 2010 .

[34]  Delphine Marris-Morini,et al.  Mid-infrared sensing between 52 and 66 µm wavelengths using Ge-rich SiGe waveguides [Invited] , 2018 .

[35]  M. S. Moreolo,et al.  Optical Fiber Communication Conference , 2014 .

[36]  Manfred Berroth,et al.  High bandwidth Ge p-i-n photodetector integrated on Si , 2006 .

[37]  G. Capellini,et al.  Germanium Plasmon Enhanced Resonators for Label-Free Terahertz Protein Sensing , 2018 .

[38]  D. Miller,et al.  A Ge/SiGe quantum well waveguide modulator monolithically integrated with SOI waveguides , 2012, 8th IEEE International Conference on Group IV Photonics.

[39]  F. Y. Gardes,et al.  Group IV mid-infrared photonics , 2015, Photonics West - Optoelectronic Materials and Devices.

[40]  David A. B. Miller,et al.  Device Requirements for Optical Interconnects to Silicon Chips , 2009, Proceedings of the IEEE.

[41]  L Carletti,et al.  Nonlinear optical response of low loss silicon germanium waveguides in the mid-infrared. , 2015, Optics express.

[42]  Z. Ikonic,et al.  Adiabatic mode coupling between SiGe photonic devices and SOI waveguides. , 2012, Optics express.

[43]  Jifeng Liu,et al.  Emerging technologies in Si active photonics , 2018, Journal of Semiconductors.

[44]  Paul Crozat,et al.  Integrated waveguide PIN photodiodes exploiting lateral Si/Ge/Si heterojunction. , 2017, Optics express.

[45]  Graham T. Reed,et al.  0.15 dB/cm loss in Unibond SOI waveguides , 1999 .

[46]  R Loo,et al.  GeSn/Ge heterostructure short-wave infrared photodetectors on silicon. , 2012, Optics express.

[47]  Franz–Keldysh effect of germanium-on-silicon p–i–n diodes within a wide temperature range , 2012 .

[48]  B. Marzban,et al.  Design of a high-speed germanium-tin absorption modulator at mid-infrared wavelengths , 2017, 2017 IEEE 14th International Conference on Group IV Photonics (GFP).

[49]  Richard A. Soref,et al.  Group IV photonics: Enabling 2 [mu]m communications , 2015 .

[50]  Eugenio Calandrini,et al.  Midinfrared Plasmon-Enhanced Spectroscopy with Germanium Antennas on Silicon Substrates. , 2015, Nano letters.

[51]  David J. Thomson,et al.  Silicon optical modulators , 2010 .

[52]  Koji Yamada,et al.  Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuators. , 2010, Optics express.

[53]  Gunther Roelkens,et al.  Efficient 5.2 µm wavelength fiber-to-chip grating couplers for the Ge-on-Si and Ge-on-SOI mid-infrared waveguide platform. , 2017, Optics express.

[54]  Jurgen Michel,et al.  Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators , 2008 .

[55]  J. Wang,et al.  Low-Voltage High-Speed (18 GHz/1 V) Evanescent-Coupled Thin-Film-Ge Lateral PIN Photodetectors Integrated on Si Waveguide , 2008, IEEE Photonics Technology Letters.

[56]  Douglas J. Paul,et al.  Tunability of the dielectric function of heavily doped germanium thin films for mid-infrared plasmonics , 2016 .

[57]  Laurent Vivien,et al.  Reduced pressure–chemical vapor deposition of Ge thick layers on Si(001) for 1.3–1.55-μm photodetection , 2004 .

[58]  M. Berroth,et al.  Ge-on-Si vertical incidence photodiodes with 39-GHz bandwidth , 2005, IEEE Photonics Technology Letters.

[59]  Douglas J. Paul,et al.  Optical properties of highly n-doped germanium obtained by in situ doping and laser annealing , 2017 .

[60]  Xin Yin,et al.  DAC-Less and DSP-Free 112 Gb/s PAM-4 Transmitter Using Two Parallel Electroabsorption Modulators , 2018, Journal of Lightwave Technology.

[61]  K. Saraswat,et al.  Low-threshold optically pumped lasing in highly strained germanium nanowires , 2017, Nature Communications.

[62]  M. Chagnon,et al.  Experimental study of 112 Gb/s short reach transmission employing PAM formats and SiP intensity modulator at 1.3 μm. , 2014, Optics express.

[63]  Po Dong,et al.  High-speed low-voltage single-drive push-pull silicon Mach-Zehnder modulators. , 2012, Optics express.

[64]  M. Guzzi,et al.  Thin SiGe virtual substrates for Ge heterostructures integration on silicon , 2014 .

[65]  Kazumi Wada,et al.  Mid-IR supercontinuum generated in low-dispersion Ge-on-Si waveguides pumped by sub-ps pulses. , 2017, Optics express.

[66]  Mathieu Carras,et al.  Low-loss Ge-rich Si0.2Ge0.8 waveguides for mid-infrared photonics. , 2017, Optics letters.

[67]  E. Cassan,et al.  UHV-CVD growth and annealing of thin fully relaxed Ge films on (0 0 1)Si. , 2005 .

[68]  GeSn/SiGeSn Multiple-Quantum-Well Electroabsorption Modulator With Taper Coupler for Mid-Infrared Ge-on-Si Platform , 2018, IEEE Journal of Selected Topics in Quantum Electronics.

[69]  Richard Soref,et al.  Predictions of Free-Carrier Electroabsorption and Electrorefraction in Germanium , 2015, IEEE Photonics Journal.

[70]  D. Paul,et al.  Mid-infrared intersubband absorption from p-Ge quantum wells grown on Si substrates , 2016 .

[71]  Xavier Le Roux,et al.  Sharp bends and Mach-Zehnder interferometer based on Ge-rich-SiGe waveguides on SiGe graded buffer. , 2015, Optics express.

[72]  Xavier Le Roux,et al.  Quantum-confined Stark effect at 1.3 μm in Ge/Si(0.35)Ge(0.65) quantum-well structure. , 2012, Optics letters.

[73]  V. Vakarin,et al.  Ge-rich graded-index Si1-xGex waveguides with broadband tight mode confinement and flat anomalous dispersion for nonlinear mid-infrared photonics. , 2017, Optics express.

[74]  S. Wiese,et al.  Small-size Silicon Photonic IQ modulator and low-power CMOS driver for next generation Coherent Transceivers , 2013, Proceedings of the 2013 18th European Conference on Network and Optical Communications & 2013 8th Conference on Optical Cabling and Infrastructure (NOC-OC&I).

[76]  Periklis Petropoulos,et al.  Towards nonlinear conversion from mid- to near-infrared wavelengths using Silicon Germanium waveguides. , 2014, Optics express.

[77]  Elia Palange,et al.  Metal–semiconductor–metal near-infrared light detector based on epitaxial Ge/Si , 1998 .

[78]  Mid Infrared Nonlinear Plasmonics using Germanium Nanoantennas on Silicon Substrates , 2018, 1802.04152.

[79]  Anant Agarwal,et al.  Kerr nonlinearity and multi-photon absorption in germanium at mid-infrared wavelengths , 2017 .

[80]  M. Chagnon,et al.  Experimental parametric study of 128 Gb/s PAM-4 transmission system using a multi-electrode silicon photonic Mach Zehnder modulator. , 2017, Optics express.

[81]  B. Mikkelsen,et al.  O, E, S, C, and L band silicon photonics coherent modulator/receiver , 2016, 2016 Optical Fiber Communications Conference and Exhibition (OFC).

[82]  M Myronov,et al.  Modulation of the absorption coefficient at 1.3 μm in Ge/SiGe multiple quantum well heterostructures on silicon. , 2011, Optics letters.

[83]  ohammad,et al.  Broadband telecom to mid-infrared supercontinuum generation in a dispersion-engineered Silicon Germanium waveguide , 2015 .

[84]  M. Watts,et al.  Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current. , 2011, Optics express.

[85]  Paul Crozat,et al.  Integrated germanium optical interconnects on silicon substrates , 2014, Nature Photonics.

[86]  D. Moss,et al.  Dispersion engineered air-clad SiGe waveguides with low propagation loss in the mid-infrared , 2017, 2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC).

[87]  Xavier Le Roux,et al.  Ultra-wideband Ge-rich silicon germanium integrated Mach-Zehnder interferometer for mid-infrared spectroscopy. , 2017, Optics letters.

[88]  P. Biagioni,et al.  Tunability and Losses of Mid-infrared Plasmonics in Heavily Doped Germanium Thin Films , 2016, 1601.05321.

[89]  R. Loo,et al.  Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared , 2013 .

[90]  J. Faist,et al.  Lasing in direct-bandgap GeSn alloy grown on Si , 2015, Nature Photonics.

[91]  S. Radosavljevic,et al.  Mid-infrared Vernier racetrack resonator tunable filter implemented on a germanium on SOI waveguide platform [Invited] , 2018 .

[92]  Arnan Mitchell,et al.  Mid-infrared octave spanning supercontinuum generation to 8.5 μm in silicon-germanium waveguides , 2018 .

[93]  Advances Toward Ge/SiGe Quantum-Well Waveguide Modulators at 1.3μm , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[94]  Xavier Le Roux,et al.  Nonlinear Properties of Ge-rich Si1−xGex Materials with Different Ge Concentrations , 2017, Scientific Reports.

[95]  Hongtao Lin,et al.  Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing. , 2014, ACS nano.

[96]  Guo-Qiang Lo,et al.  Novel evanescent-coupled germanium electro-absorption modulator featuring monolithic integration with germanium p-i-n photodetector. , 2011, Optics express.

[97]  M Myronov,et al.  Ge/SiGe quantum confined Stark effect electro-absorption modulation with low voltage swing at λ = 1550 nm. , 2014, Optics express.

[98]  P. Biagioni,et al.  n-Ge on Si for mid-infrared plasmonic sensors , 2017, 2017 IEEE Photonics Society Summer Topical Meeting Series (SUM).

[99]  H. Zimmermann,et al.  Zero-bias 40Gbit/s germanium waveguide photodetector on silicon. , 2012, Optics express.

[100]  Periklis Petropoulos,et al.  Broadband telecom to mid-infrared supercontinuum generation in a dispersion-engineered silicon germanium waveguide. , 2015, Optics letters.

[101]  A. Khokhar,et al.  Germanium-on-silicon Vernier-effect photonic microcavities for the mid-infrared. , 2016, Optics letters.

[102]  Usman Younis,et al.  Germanium-on-SOI waveguides for mid-infrared wavelengths. , 2016, Optics express.

[103]  M. Dressel,et al.  Ellipsometric characterization of doped Ge0.95Sn0.05 films in the infrared range for plasmonic applications. , 2016, Optics letters.

[104]  P Crozat,et al.  Low loss 40 Gbit/s silicon modulator based on interleaved junctions and fabricated on 300 mm SOI wafers. , 2013, Optics express.

[105]  Dingshan Gao,et al.  High- $Q$ and High-Sensitivity One-Dimensional Photonic Crystal Slot Nanobeam Cavity Sensors , 2016, IEEE Photonics Technology Letters.

[106]  Kazumi Wada,et al.  Mid-infrared integrated photonics on silicon: a perspective , 2017 .

[107]  M. Romagnoli,et al.  An electrically pumped germanium laser. , 2012, Optics express.

[108]  Milos Nedeljkovic,et al.  Mid-infrared all-optical modulation in low-loss germanium-on-silicon waveguides. , 2015, Optics letters.

[109]  Yu-Chi Chang,et al.  Low-loss germanium strip waveguides on silicon for the mid-infrared. , 2012, Optics letters.

[110]  Milos Nedeljkovic,et al.  Surface-Grating-Coupled Low-Loss Ge-on-Si Rib Waveguides and Multimode Interferometers , 2015, IEEE Photonics Technology Letters.

[111]  Lin Yang,et al.  Silicon 16-QAM optical modulator driven by four binary electrical signals. , 2017, Optics letters.

[112]  G Roelkens,et al.  III-V-on-silicon integrated micro - spectrometer for the 3 μm wavelength range. , 2016, Optics express.

[113]  K. Saraswat,et al.  Low-threshold optically pumped lasing in highly strained Ge nanowires , 2017 .

[114]  Peter Metz,et al.  Ultra-Low-Power Single-Polarization QAM-16 Generation Without DAC Using a CMOS Photonics Based Segmented Modulator , 2015, Journal of Lightwave Technology.

[115]  William M. J. Green,et al.  Monolithic 56 Gb/s silicon photonic pulse-amplitude modulation transmitter , 2016, 1608.07563.

[116]  J. De Coster,et al.  Dark current analysis in high-speed germanium p-i-n waveguide photodetectors , 2016 .

[117]  Xavier Le Roux,et al.  Quantum-confined Stark effect measurements in Ge/SiGe quantum-well structures. , 2010, Optics letters.

[118]  Mitsuru Takenaka,et al.  Novel Ge waveguide platform on Ge-on-insulator wafer for mid-infrared photonic integrated circuits. , 2016, Optics express.

[119]  F. De Leonardis,et al.  Mid-IR Optical and Nonlinear Properties of Germanium on Silicon Optical Waveguides , 2014, Journal of Lightwave Technology.

[120]  I. A. Fischer,et al.  Optofluidic sensor system with Ge PIN photodetector for CMOS-compatible sensing , 2017 .

[121]  Kang L. Wang,et al.  Intersubband absorption in Si1−xGex/Si multiple quantum wells , 1990 .

[122]  David A. B. Miller,et al.  Quantum-Confined Stark Effect in Ge/SiGe Quantum Wells on Si for Optical Modulators , 2006 .

[123]  Tom Baehr Jones,et al.  50 Gb/s silicon traveling wave Mach-Zehnder modulator near 1300 nm , 2013, OFC 2014.

[124]  Paul Crozat,et al.  Low voltage 25Gbps silicon Mach-Zehnder modulator in the O-band. , 2017, Optics express.

[125]  A. Khokhar,et al.  High-speed Si/GeSi hetero-structure Electro Absorption Modulator. , 2018, Optics express.

[126]  Mathieu Carras,et al.  Design, fabrication and characterization of an AWG at 4.5 µm. , 2015, Optics express.

[127]  L. Vivien,et al.  Towards low energy consumption integrated photonic circuits based on Ge/SiGe quantum wells , 2013 .

[128]  V. Reboud,et al.  Germanium based photonic components toward a full silicon/germanium photonic platform , 2017 .

[129]  P. Crozat,et al.  42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide. , 2009, Optics express.

[130]  Wei Du,et al.  Systematic study of Si-based GeSn photodiodes with 2.6 µm detector cutoff for short-wave infrared detection. , 2016, Optics express.

[131]  Jurgen Michel,et al.  Tensile-strained, n-type Ge as a gain medium for monolithic laser integration on Si. , 2007, Optics express.

[132]  A. Grill,et al.  High-speed Germanium-on-SOI lateral PIN photodiodes , 2004, IEEE Photonics Technology Letters.

[133]  L Vivien,et al.  Graded SiGe waveguides with broadband low-loss propagation in the mid infrared. , 2018, Optics express.

[134]  David J. Thomson,et al.  Silicon photonic devices and platforms for the mid-infrared , 2013 .

[135]  Pao Tai Lin,et al.  On-chip mid-infrared gas detection using chalcogenide glass waveguide , 2016 .

[136]  G. Agrawal,et al.  Nonlinear optical phenomena in silicon waveguides: modeling and applications. , 2007, Optics express.

[137]  D. Miller,et al.  Strong quantum-confined Stark effect in germanium quantum-well structures on silicon , 2005, Nature.

[138]  N. Feng,et al.  36 GHz submicron silicon waveguide germanium photodetector. , 2011, Optics express.

[139]  Milos Nedeljkovic,et al.  Germanium-on-silicon waveguides operating at mid-infrared wavelengths up to 8.5 μm. , 2017, Optics express.

[140]  Fan Yang,et al.  Silicon Based GeSn p-i-n Photodetector for SWIR Detection , 2016, IEEE Photonics Journal.

[141]  N. D. de Rooij,et al.  Cocaine detection by a mid-infrared waveguide integrated with a microfluidic chip. , 2012, Lab on a chip.

[142]  Uhammad,et al.  A mid-infrared Vernier racetrack resonator tunable filter implemented on a Germanium on SOI waveguide platform , 2018 .

[143]  Tymon Barwicz,et al.  Demonstration of electrooptic modulation at 2165nm using a silicon Mach-Zehnder interferometer. , 2012, Optics express.

[144]  Mitsuru Takenaka,et al.  Mid-infrared high-Q germanium microring resonator. , 2018, Optics letters.

[145]  James S. Wilkinson,et al.  Germanium Mid-Infrared Photonic Devices , 2017, Journal of Lightwave Technology.

[146]  M. Berroth,et al.  Ge-on-Si p-i-n Photodiodes With a 3-dB Bandwidth of 49 GHz , 2009, IEEE Photonics Technology Letters.

[147]  D. Thomson,et al.  Optical detection and modulation at 2µm-2.5µm in silicon. , 2014, Optics express.

[148]  Jurgen Michel,et al.  Nonlinear Group IV photonics based on silicon and germanium: from near-infrared to mid-infrared , 2014 .

[149]  Xavier Le Roux,et al.  Giant electro-optic effect in Ge/SiGe coupled quantum wells , 2015, Scientific Reports.

[150]  G. Torfs,et al.  Real-Time 100 Gb/s NRZ and EDB Transmission With a GeSi Electroabsorption Modulator for Short-Reach Optical Interconnects , 2018, Journal of Lightwave Technology.

[151]  David J. Thomson,et al.  Group IV mid-infrared photonics [Invited] , 2018, Optical Materials Express.