Calibration method of spot scanning three-dimensional topography measuring system

The invention discloses a calibration method of spot scanning a three-dimensional topography measuring system. The calibration method comprises three major steps as follows: firstly establishing a measuring system model and determining parameters to be calibrated, then taking a precise displacement platform, a precise rotating platform and a standard plane target as calibration devices, adjusting positions and postures of the calibration devices, so as to meet calibration requirements, driving the standard plane target to move and rotate through the precise displacement platform and the precise rotating platform, so as to obtain calibration data in all directions, and finally, solving the parameters to be calibrated through a method of maximum likelihood estimation, determining a system model, and realizing accurate calibration of the system. The calibration method has higher practical value and wide application prospect in the field of photoelectric measurement.