Atomic layer deposition of amorphous TiO2/ZnO multilayers for soft x-ray coherent optics
暂无分享,去创建一个
Masaki Murata | Yuji Tanaka | Hiroshi Kumagai | Masaya Chigane | Yasutaka Sanjo | H. Kumagai | M. Chigane | M. Murata | Yuji Tanaka | Y. Sanjo
[1] D Sayre,et al. X-ray microscopes. , 1991, Scientific American.
[2] Philippe Balcou,et al. Compression of attosecond harmonic pulses by extreme-ultraviolet chirped mirrors. , 2005, Optics letters.
[3] Steven M. George,et al. ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements , 2002 .
[4] Sang Jik Kwon,et al. Effect of Precursor-Pulse on Properties of Al-Doped ZnO Films Grown by Atomic Layer Deposition , 2005 .
[5] Steven M. George,et al. Surface Chemistry for Atomic Layer Growth , 1996 .
[6] Koichi Toyoda,et al. Titanium oxide/aluminum oxide multilayer reflectors for "water-window" wavelengths , 1997 .
[7] Roy G. Gordon,et al. Highly conformal atomic layer deposition of tantalum oxide using alkylamide precursors , 2003 .
[8] S. George,et al. Rapid SiO2 Atomic Layer Deposition Using Tris(tert-pentoxy)silanol , 2008 .
[9] M. Schuisky,et al. Atomic layer growth of epitaxial TiO2 thin films from TiCl4 and H2O on α-Al2O3 substrates , 2002 .