Comparison of hysteresis of high accuracy positioning system with piezoelectric actuators

In the paper, high accuracy positioning systems with flexible elements are investigated. In the analyzed systems, piezoelectric actuators are used for the transmission of motion and the hystereric phenomenon in them is investigated. Effect of the hysteretic phenomena to the precision of the high accuracy positioning systems is of special importance. For the investigations, a special experimental setup was designed and produced as well as the method of the experimental procedure was proposed. The experimental setup includes a computer, a piezocontroller, an inductive displacement sensor and a dynamic data collector. The dynamic data collector is used for the collection of data and for the transfer of data to the software for further processing. Numerical modelling of the hysteretic was performed by using the Matlab/Simulink software. In the process of investigations, it was determined that the maximum dispersion error of the hysteretic model is less than 5 % when compared with the experimental results. Thus, it is concluded that the proposed method of hysteretic phenomenon modelling is suitable for modelling of high accuracy positioning systems with flexible elements, which are controlled by piezoelectric actuators.

[1]  Kuo-Ming Chang,et al.  Model reference adaptive control for a piezo-positioning system , 2010 .

[2]  Si-Lu Chen,et al.  SVD-based Preisach hysteresis identification and composite control of piezo actuators. , 2012, ISA transactions.

[3]  B. Arda Gozen,et al.  A method for open-loop control of dynamic motions of piezo-stack actuators , 2012 .

[4]  Chih-Jer Lin,et al.  Particle swarm optimization based feedforward controller for a XY PZT positioning stage , 2012 .

[5]  Giedrius Augustinavičius,et al.  Research on the hysteresis effect on positioning the system with flexible elements / Pozicionavimo sistemos su lanksčiaisiais elementais histerezės efekto tyrimas , 2015 .

[6]  Chih-Jer Lin,et al.  Evolutionary algorithm based feedforward control for contouring of a biaxial piezo-actuated stage , 2009 .

[7]  Chih-Jer Lin,et al.  Tracking control of a biaxial piezo-actuated positioning stage using generalized Duhem model , 2012, Comput. Math. Appl..

[8]  Qingsong Xu,et al.  Modeling and performance evaluation of a flexure-based XY parallel micromanipulator , 2009 .

[9]  Lothar Gaul,et al.  Model-based piezoelectric hysteresis and creep compensation for highly-dynamic feedforward rest-to-rest motion control of piezoelectrically actuated flexible structures , 2009 .

[10]  Dawei Zhang,et al.  Design issues in a decoupled XY stage: Static and dynamics modeling, hysteresis compensation, and tracking control , 2013 .

[11]  Changhui Rao,et al.  Precision control of piezo-actuated optical deflector with nonlinearity correction based on hysteresis model , 2014 .

[12]  Tegoeh Tjahjowidodo,et al.  Hysteresis modeling and position control of tendon-sheath mechanism in flexible endoscopic systems , 2014 .

[13]  Vahid Hassani,et al.  Dynamic modeling of 3-DOF pyramidal-shaped piezo-driven mechanism , 2013 .

[14]  Qingsong Xu,et al.  Adaptive Sliding Mode Control With Perturbation Estimation and PID Sliding Surface for Motion Tracking of a Piezo-Driven Micromanipulator , 2010, IEEE Transactions on Control Systems Technology.

[15]  Tegoeh Tjahjowidodo,et al.  Structural response investigation of a triangular-based piezoelectric drive mechanism to hysteresis effect of the piezoelectric actuator , 2013 .

[16]  Placid Mathew Ferreira,et al.  A novel parallel-kinematics mechanism for integrated, multi-axis nanopositioning: Part 2: Dynamics, control and performance analysis , 2008 .

[17]  Kam K. Leang,et al.  Accounting for hysteresis in repetitive control design: Nanopositioning example , 2012, Autom..