Investigation of Microopto-eletromechanical Angular Velocity and Acceleration Transducers based on Optical Tunneling Effect

Abstract In this paper the possibility of microopto-electromechanical (MOEM) angular velocity and acceleration transducers based on optical tunneling effect (OTE) is considered. The generalized model of MOEM transducers with various types of sensing elements (SE) is developed, transfer functions are investigated, and the errors with various design parameters of transducers are estimated.